PHI 5000 Versa Probe II

Gray-Little Hall, Room B105B

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Ultra-high vacuum instrument, raster scanned, micro focused, x-ray beam
20 kV electron gun
Floating column argon ion gun
LaB6 emitter- creates a raster-scanned electron beam focused on the Al anode of the x-ray source to produce a monochromated x-rays
Ellipsoidal shaped quartz crystal monochromator- collects, filters, and refocuses x-rays onto the sample surface to scan and acquire the spectrum
Dual-beam charge neutralization
Compucentric Zalar rotation
Sputter depth profiling (5V to 5000)
Angle-resolved spectroscopy
Chemical state imaging
Elemental composition and chemical mapping with SXI (Secondary X-ray Imaging) and Scanning Electron Microscopy (SEM; using secondary electrons)
Five-axis automated sample manipulator
25 mm and 60 mm diameter sample holders
Extra Sample Prep chamber with Heating, Cooling, and mixture of Gases
X-ray beam size for XPS ranges from 9 µ to 200 µ and AES is scanned at 100 nm