Hitachi S4700 Cold-Field Emission Scanning Electron Microscope

Haworth Hall, Room 1043C

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Hitachi Scanning Electron Microscope (Model S-4700 Type II)
Cold cathode field emission gun
Computer-controlled flashing, extraction and accelerating voltage
Anode heater
Mild flashing function
Accelerating voltage 500 V to 30 kV
Landing voltage 0.01-2 kV (with deceleration)
Magnification 20x to 1,000,000x (referenced to 4”× 5” photo)
SE resolution 0.8 nm (15 kV), 1.1 nm (1kV landing voltage)
Optical Modes:
- Normal probe current- optimized for high resolution imaging
- High probe current- increased beam current, without significant loss of resolution, for analytical techniques
- Ultra-high resolution- optimized for short working distances
- High resolution- optimized for long working distances
AZtecEnergy Standard Microanalysis System with X-MaxN 80 large area Analytical Silicon Drift Detector (Oxford Instruments)
Lower SED for standard topographic imaging
Upper through-the-Lens (TTL) SED for high resolution imaging, Top TTL SED, for high resolution imaging with adjustable high pass filter function, In-lens collection system for imaging of low and/or high angle Backscattered Electron (BSE) signals
SE/BSE signal selection and mixing for TTL detectors
YAG Backscattered Electron (BSE) detector
6” Diameter Specimen Exchange airlock