Hitachi SU8230 Field Emission Scaning Electron Microscope
Haworth Hall Room 1043C
Features
- Cold Field Emission Scanning Electron Microscope (CFE-SEM)
- New generation cold cathode field emission gun
- Computer-controlled flashing, extraction and accelerating voltage
- Mild flashing function
- Anode heater
- Accelerating voltage 500V to 30kV
- Landing voltage 0.01 - 2 kV (with deceleration)
- Magnification 20x to 1,000,000x (referenced to 4”× 5” photo)
- SE resolution 0.8 nm (15 kV), 1.1 nm (1kV landing voltage)
- Optical Modes
- Normal probe current, optimized for high-resolution imaging
- High probe current
- increased beam current, without significant loss of resolution, for analytical techniques
- Ultra high resolution, optimized for short working distances
- High resolution, optimized for long working distances
- Triple Secondary Electron Detector (SED) configuration, with ExB in-column filtering
- Lower SED for standard topographic imaging
- Upper through-the-Lens (TTL) SED for high-resolution imaging
- Top TTL SED, for high-resolution imaging with adjustable high pass filter function
- In-lens collection system for imaging of low and/or high angle Backscattered Electron (BSE) signals
- SE/BSE signal selection and mixing for TTL detectors
- YAG Backscattered Electron (BSE) detector
- Electromagnetic beam blanker, with automated blanking when image is frozen
- 5-position objective lens aperture with built-in anticontamination heater
- 6” Diameter Specimen Exchange airlock, with two touch holder exchange
- 5-axis automated stage with selectable speed
- Full coverage of up to a 150mm diameter sample
- Specimen navigation via Rapid Image Shift Movement (RISM) and Image Navigator with optical image
- Built-in specimen anti-contamination device
- Energy-saving (ECO) mode: 0.3kVA power consumption
Workstation and Support Station Specifications
Workstation for microscope control and acquisition
- Intel Xeon E3-V3
- 4GB RAM
- NVIDIA Quadro K620 graphics card
- one-1TB SATA HDD
- Windows 7 32 bit
