Research Resource Core Laboratory

Hitachi SU8230 Field Emission Scaning Electron Microscope

Haworth Hall Room 1043C


  • Cold Field Emission Scanning Electron Microscope (CFE-SEM)
  • New generation cold cathode field emission gun
  • Computer-controlled flashing, extraction and accelerating voltage
  • Mild flashing function
  • Anode heater
  • Accelerating voltage 500V to 30kV
  • Landing voltage 0.01 - 2 kV (with deceleration)
  • Magnification 20x to 1,000,000x (referenced to 4”× 5” photo)
  • SE resolution 0.8 nm (15 kV), 1.1 nm (1kV landing voltage)
  • Optical Modes
  • Normal probe current, optimized for high-resolution imaging
  • High probe current
  • increased beam current, without significant loss of resolution, for analytical techniques
  • Ultra high resolution, optimized for short working distances
  • High resolution, optimized for long working distances
  • Triple Secondary Electron Detector (SED) configuration, with ExB in-column filtering
  • Lower SED for standard topographic imaging
  • Upper through-the-Lens (TTL) SED for high-resolution imaging
  • Top TTL SED, for high-resolution imaging with adjustable high pass filter function
  • In-lens collection system for imaging of low and/or high angle Backscattered Electron (BSE) signals
  • SE/BSE signal selection and mixing for TTL detectors
  • YAG Backscattered Electron (BSE) detector
  • Electromagnetic beam blanker, with automated blanking when image is frozen
  • 5-position objective lens aperture with built-in anticontamination heater
  • 6” Diameter Specimen Exchange airlock, with two touch holder exchange
  • 5-axis automated stage with selectable speed
  • Full coverage of up to a 150mm diameter sample
  • Specimen navigation via Rapid Image Shift Movement (RISM) and Image Navigator with optical image
  • Built-in specimen anti-contamination device
  • Energy-saving (ECO) mode: 0.3kVA power consumption

Workstation and Support Station Specifications

Workstation for microscope control and acquisition

  •  Intel Xeon E3-V3
  • 4GB RAM
  • NVIDIA Quadro K620 graphics card
  • one-1TB SATA HDD
  • Windows 7 32 bit

​​​​​Please contact Dr. Eduardo Rosa-Molinar (Director/Professor) if you need further details.


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Dr. Eduardo Rosa-Molinar 

Director/ Professor 


Dr. Eduardo Rosa-Molinar

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