FEI Versa 3D Dual Beam

Field Emission Scanning Electron Microscope/Focus Ion Beam
Available High Vacuum, Low Vacuum and Environmental Modes
Platinum and Carbon Deposition
Enhanced Etch and Selective Carbon Mill
In Chamber Plasma Cleaner for samples

HiVac Detectors
Everhard-Thornley (SE and BSE)
InColumn detector (SE with Beam Deceleration)
Ion Conversion and Electron detector (E-beam: SE and BSE, I-beam: SE and SI)
Concentric Backscattered (BSE)

LoVac/ESEM Detectors
Low Vacuum secondary Electron (SE+BSE)
Gaseous Secondary Electron (SE)

Other detectors (not constrained to mode)
Energy Dispersive X-Ray Spectrometry (EDS)
Cathodo-Luminescence Electron-Induced Fluorescence (CL)
Electron Backscatter Diffraction (EBSD)
Scanning Transmission Electron Microscopy (STEM)
EasyLift Needle (for collection of TEM lamella)

Other Options
Hot stage and Peltier Stage
Automation software
Slice and View (automation software for slicing and image collection)
EDS3 (the same as Slice and View also collects EDS maps)
EBSD3 (the same as Slice and View also collects EBSD maps)
AutoTEM (automation software for creating TEM lamella)

Versa 3D


Room 1043, Haworth Hall


Instrument Reservations Site


fees schedule link

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